|
|
 |
|
|
| Sicera Cryopump - Sumitomo Heavy Industries : DigInfo |
 |
http://movie.diginfo.tv DigInfo News
A cryopump is a capture-type vacuum pump
which condenses gases and vapors at extremely
low temperatures and removes them from the
environment. They are used in situations such
as semiconductor and flat-panel manufacturing
facilities and the electro-optics industry,
where a regular pump could contaminate the
system. Sumitomo Heavy Industries, a
recognized innovator of cryopumps for high
and ultra high vacuum applications, have
released the Sicera cryopump, their latest
evolution in cryopump technology, which
began with its invention in the 1970's. The
Sicera can pump 4,000 liters of water, 1,500
liters of air or 2,200 liters of hydrogen per
second, and has a gas capacity for hydrogen
of 12 liters. Four to seven pumps can be
driven by only one compressor, reducing power
consumption to 0.9 kW per pump, which is up
to 60% less than competing systems. The
Sicera can consistently maintain a high
vacuum rate at a stable level for use in a
variety of specialized environments and the
fully-automated regeneration time of this
pump is only 2 hours.
Tags : diginfo cryopump sicera sumitomo vacuum pump cryogenic clean room FPD flat panel display semiconductor cooling system |
|
Affichage : 758
Durée : 91 s |
|
|
|
|
|
|
|
|
|
|
 |
| |
|
